Nаnopаrticlе Enginееring for Chеmicаl-Mеchаnicаl Plаnаrizаtion: Fаbricаtion of Nеxt-Gеnеrаtion Nаnodеvicеs
Publisher: СRС
Number of Pages: 221
Published: 2009-02-20
List price: $149.95
In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices. Nanoparticle Engineering for Chemical-Mechanical Planarization explains the physicochemical properties of nanoparticles according to each st...