Gary S. May,«Fundamentals of Semiconductor Manufacturing and Process Control»
Wiley-IEEE Press | ISBN:0471784060 | PDF | 4,24 Mb | 488 Pages | 2006 Year
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design
Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.
In simple terms, manufacturing can be defined as the process by which raw materials are converted into finished products. The purpose of this book is to examine in detail the methodology by which electronic materials and supplies are converted into finished integrated circuits and electronic products in a highvolume manufacturing environment. This subject of this book will be issues relevant to the industrial-level manufacture of microelectronic device and circuits, including (but not limited to) fabrication sequences, process control, experimental
design, process modeling, yield modeling, and CIM/CAM systems. The book will include theoretical and practical descriptions of basic manufacturing concepts, aswell as some case studies, sample problems, and suggested exercises.
The book is intended for graduate students and can be used conveniently in a semester-length course on semiconductor manufacturing. Such a course may ormay not be accompanied by a corequisite laboratory. The text can also serve as a reference for practicing engineers and scientists in the semiconductor industry.
Chapter 1 of the book places the manufacture of integrated circuits into its historical context, as well as provides an overview of modern semiconductor manufacturing.
In the Chapter 2, we provide a broad overview of the manufacturing technology and processes flows used to produce a variety of semiconductor products. Various process monitoring methods, including those that focus on product
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