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Author(s): Eugene Machlin
ISBN: 9780080446394
Publisher: Elsevier Science
Edition: 2
Date: 09 Dec 2005
Pages: 228

The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship.

Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following:

Electrical properties
Magnetic properties
Optical properties
Mechanical properties
Mass transport properties
Interface and junction properties
Defects and properties

* Captures the importance of thin films to microelectronic development
* Examines the cause / effect relationship of structure on thin film properties

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