James J. Allen “Micro Electro Mechanical System Design”
CRC ; 1 edition | 496 pages | 2005 | ISBN: 0824758242 | 15.58 MB
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.
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