Sergey E. Lyshevski , Sergey Edward Lyshevski
“Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering”
CRC ; 1 edition | 352 pages | 2000 | ISBN: 0849309166 | PDF | 6.33 MB
Nanoengineering and technology will change the very nature of most human-made structures, devices, and systems. Developing the basic theoretical foundations needed to design, develop, analyze, and prototype high-performance micro- and nano-mechanical systems (MEMS and NEMS), this text brings together the various methods, techniques, and technologies needed to solve a wide array of engineering problems.
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