
By Gary S. May, Simon M. Sze,
- Publisher: Wiley
- Number Of Pages: 352
- Publication Date: 2003-04-04
- Sales Rank: 426450
- ISBN / ASIN: 0471232793
- EAN: 0723812119042
- Binding: Hardcover
- Manufacturer: Wiley
- Studio: Wiley
- Average Rating: 1
- Total Reviews: 1
Book Description:
Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence
Presents comprehensive coverage of process sequences
Introduces readers to modern simulation tools
Addresses the practical aspects of integrated circuit fabrication
Clearly explains basic processing theory
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