346 pages | Dec, 2007 | PDF | 5 Mb
The rapid development of nanotechnology has created a need for advanced nanohandling tools and techniques. One active branch of research in this area focuses on the use of microrobots for automated handling of micro- and nanoscale objects. Automated Nanohandling by Microrobots presents work on the development of a versatile microrobot-based nanohandling robot station inside a scanning electron microscope (SEM). The SEM serves as a powerful vision sensor, providing a high resolution and a high depth of focus, allowing different fields of application to be opened up.